Resonant MEMS

Resonant MEMS Brand, Oliver The presentation discusses resonant MEMS and, in particular, resonant microsensors, in which the measurand affects a characteristic of the resonance behavior of a microstructure, such as its resonance frequency or quality factor. The seminar will cover the theoretical background of resonant MEMS and discuss different ways of how the measurand can interact with the resonance characteristics of a MEMS structure. The resonant MEMS concepts will be explained using a number of examples, including chemical sensors and magnetic field sensors. Presented a lecture at the Nano@Tech Meeting on December 8, 2015 at 12:00 p.m. in the Microelectronics Research Center, room 102 A/B.; Oliver Brand is a Professor in the School of Electrical and Computer Engineering and the Executive Director of the Institute for Electronics and Nanotechnology {IEN) at the Georgia Institute of Technology. His research interes are in the areas of integrated microsystems, microsensors, MEMS fabrication technologies, and microsystem packaging.; Runtime: 58:35 minutes

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